High entropy alloy thin films deposited by magnetron sputtering of powder targets

标题
High entropy alloy thin films deposited by magnetron sputtering of powder targets
作者
关键词
Thin films, Magnetron sputter deposition, Powder targets, High entropy alloys
出版物
THIN SOLID FILMS
Volume 580, Issue -, Pages 71-76
出版商
Elsevier BV
发表日期
2015-03-04
DOI
10.1016/j.tsf.2015.02.070

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