Preparation of p-type SnO thin films and transistors by sputtering with robust Sn/SnO2 mixed target in hydrogen-containing atmosphere

Published 2015 View Full Article

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Title
Preparation of p-type SnO thin films and transistors by sputtering with robust Sn/SnO2 mixed target in hydrogen-containing atmosphere
Authors
Keywords
Oxide semiconductor, p-Type, Tin oxide, Sputtering, Thin film transistor
Journal
THIN SOLID FILMS
Volume 585, Issue -, Pages 50-56
Publisher
Elsevier BV
Online
2015-04-19
DOI
10.1016/j.tsf.2015.04.034

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