Moisture barrier evaluation of SiOx/SiNx stacks on polyimide substrates using electrical calcium test

Published 2015 View Full Article

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Title
Moisture barrier evaluation of SiOx/SiNx stacks on polyimide substrates using electrical calcium test
Authors
Keywords
Plasma-enhanced chemical vapor deposition, Silicon nitride, Silicon oxide, Water vapor transmission rate, Polyimide
Journal
THIN SOLID FILMS
Volume 580, Issue -, Pages 101-105
Publisher
Elsevier BV
Online
2015-03-14
DOI
10.1016/j.tsf.2015.02.023

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