Moisture barrier evaluation of SiOx/SiNx stacks on polyimide substrates using electrical calcium test

出版年份 2015 全文链接

标题

作者

关键词

Plasma-enhanced chemical vapor deposition, Silicon nitride, Silicon oxide, Water vapor transmission rate, Polyimide

出版物

Volume 580, Issue -, Pages 101-105

出版商

Elsevier BV

发表日期

2015-03-14

DOI

10.1016/j.tsf.2015.02.023

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