Multiwavelength Raman analysis of SiOx and N containing amorphous diamond like carbon films

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Title
Multiwavelength Raman analysis of SiOx and N containing amorphous diamond like carbon films
Authors
Keywords
Amorphous diamond-like carbon, Nitrogen-containing amorphous DLC, Silicon oxide-containing amorphous DLC, Raman spectroscopy
Journal
THIN SOLID FILMS
Volume 581, Issue -, Pages 86-91
Publisher
Elsevier BV
Online
2014-11-21
DOI
10.1016/j.tsf.2014.11.042

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