Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

Title
Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities
Authors
Keywords
-
Journal
OPTICS LETTERS
Volume 36, Issue 3, Pages 421
Publisher
The Optical Society
Online
2011-01-29
DOI
10.1364/ol.36.000421

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