Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

标题
Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities
作者
关键词
-
出版物
OPTICS LETTERS
Volume 36, Issue 3, Pages 421
出版商
The Optical Society
发表日期
2011-01-29
DOI
10.1364/ol.36.000421

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