Journal
OPTICS EXPRESS
Volume 22, Issue 12, Pages 15245-15250Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.22.015245
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Funding
- National Basic Research Program of China (973 Program) [2012CB921804]
- National Natural Science Foundation of China (NSFC) [61235003, 11204236, 61308006]
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All-silicon plano-concave microlens arrays with spherical profiles and good image performance were obtained using femtosecond laser direct irradiation and mixed acid etching. A femtosecond laser was employed to produce microhole arrays on silicon, and the microholes were expanded and smoothed by the mixed acid to form concave microlenses. The effects of the etching time, laser power, and pulse number on the microlens morphology were investigated. This method has potential applications in the fabrication of all-silicon plano-concave microlenses for use in infrared devices. (C)2014 Optical Society of America
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