Fabrication of concave spherical microlenses on silicon by femtosecond laser irradiation and mixed acid etching

Silicon Micromachined Lens Antenna for THz Integrated Heterodyne Arrays

(2013) N. Llombart et al.   IEEE Transactions on Terahertz Science and Technology

Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light

(2013) Yasser M Sabry et al.   Light-Science & Applications

Compact infrared cryogenic wafer-level camera: design and experimental validation

(2012) Florence de la Barrière et al.   APPLIED OPTICS

Luminescence of black silicon fabricated by high-repetition rate femtosecond laser pulses

(2011)   JOURNAL OF APPLIED PHYSICS

A Numerical Model of Wet Isotropic Etching of Silicon Molds for Microlenses Fabrication

(2011) M. Baranski et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Chromatic aberration control for tunable all-silicone membrane microlenses

(2011) Philipp Waibel et al.   OPTICS EXPRESS

Fabrication and characterization of linear diffusers based on concave micro lens arrays

(2010) Roland Bitterli et al.   OPTICS EXPRESS

Fabrication of concave silicon micro-mirrors

(2010) Yueh Sheng Ow et al.   OPTICS EXPRESS

Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

(2010) Feng Chen et al.   OPTICS EXPRESS

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

(2009) C. H. Lin et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Photoinduced multiple microchannels inside silicon produced by a femtosecond laser

(2009) C. Li et al.   APPLIED PHYSICS B-LASERS AND OPTICS

Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques

(2009) Jorge Albero et al.   OPTICS EXPRESS

Two-dimensional optical micro-scanner on silicon technology

(2009) Gabriela Molar-Velázquez et al.   OPTIK