Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Title
Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 21, Issue 11, Pages 13800
Publisher
The Optical Society
Online
2013-06-01
DOI
10.1364/oe.21.013800

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