Split-Frame Gimbaled Two-Dimensional MEMS Scanner for Miniature Dual-Axis Confocal Microendoscopes Fabricated by Front-Side Processing

Published 2011 View Full Article

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Title
Split-Frame Gimbaled Two-Dimensional MEMS Scanner for Miniature Dual-Axis Confocal Microendoscopes Fabricated by Front-Side Processing
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 2, Pages 308-315
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-12-14
DOI
10.1109/jmems.2011.2175368

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