Single etch grating couplers for mass fabrication with DUV lithography

Title
Single etch grating couplers for mass fabrication with DUV lithography
Authors
Keywords
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Journal
OPTICAL AND QUANTUM ELECTRONICS
Volume 44, Issue 12-13, Pages 521-526
Publisher
Springer Nature
Online
2012-02-23
DOI
10.1007/s11082-012-9563-2

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