Deposition of zirconium carbonitride composite films using ion and electron beams emitted from plasma focus device

Published 2010 View Full Article

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Title
Deposition of zirconium carbonitride composite films using ion and electron beams emitted from plasma focus device
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 268, Issue 13, Pages 2228-2234
Publisher
Elsevier BV
Online
2010-04-02
DOI
10.1016/j.nimb.2010.03.030

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