Deposition of zirconium carbonitride composite films using ion and electron beams emitted from plasma focus device

标题
Deposition of zirconium carbonitride composite films using ion and electron beams emitted from plasma focus device
作者
关键词
-
出版商
Elsevier BV
发表日期
2010-04-02
DOI
10.1016/j.nimb.2010.03.030

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