Mechanical properties of atomic layer deposited Al 2 O 3 /ZnO nanolaminates

Published 2015 View Full Article

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Title
Mechanical properties of atomic layer deposited Al 2 O 3 /ZnO nanolaminates
Authors
Keywords
Nanolaminates, Multilayer, Atomic layer deposition (ALD), Hardness, Mechanical properties, Zinc oxide, Aluminium oxide
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 284, Issue -, Pages 198-205
Publisher
Elsevier BV
Online
2015-08-18
DOI
10.1016/j.surfcoat.2015.07.078

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