Microstructure, mechanical and tribological properties of TiN/Mo 2 N nano-multilayer films deposited by magnetron sputtering

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Title
Microstructure, mechanical and tribological properties of TiN/Mo 2 N nano-multilayer films deposited by magnetron sputtering
Authors
Keywords
Magnetron sputtering, TiN/Mo, 2, N, Nano-multilayer films, Superhardness
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 261, Issue -, Pages 156-160
Publisher
Elsevier BV
Online
2014-11-23
DOI
10.1016/j.surfcoat.2014.11.041

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