Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

Title
Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films
Authors
Keywords
Plasma diagnostics, Optical emission spectroscopy, Transparent conductive oxides, DC sputtering
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 284, Issue -, Pages 85-89
Publisher
Elsevier BV
Online
2015-07-23
DOI
10.1016/j.surfcoat.2015.06.084

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