Influence of the process parameters on the characteristics of silicon-incorporated a-C:H:SiOx coatings

Published 2015 View Full Article

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Title
Influence of the process parameters on the characteristics of silicon-incorporated a-C:H:SiOx coatings
Authors
Keywords
Diamond-like carbon, SiO, , Raman spectroscopy, AFM, XPS
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 271, Issue -, Pages 112-118
Publisher
Elsevier BV
Online
2015-01-07
DOI
10.1016/j.surfcoat.2014.12.073

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