Magnetic field argon ion filtering for pulsed magnetron sputtering growth of two-dimensional MoS2

Published 2015 View Full Article

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Title
Magnetic field argon ion filtering for pulsed magnetron sputtering growth of two-dimensional MoS2
Authors
Keywords
Pulsed sputtering, Plasma characterization, Magnetic filtering, Two-dimensional film growth
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 280, Issue -, Pages 260-267
Publisher
Elsevier BV
Online
2015-09-13
DOI
10.1016/j.surfcoat.2015.09.013

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