Effect of film thickness on physical properties of RF sputtered In2S3 layers

Published 2015 View Full Article

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Title
Effect of film thickness on physical properties of RF sputtered In2S3 layers
Authors
Keywords
In, 2, S, 3, layer, Sputtering, Optical constants, Photoconductivity
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 276, Issue -, Pages 587-594
Publisher
Elsevier BV
Online
2015-06-15
DOI
10.1016/j.surfcoat.2015.06.011

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