Deposition of TiN by plasma activated EB-PVD: Activation by thermal electron emission from molten niobium

Published 2015 View Full Article

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Title
Deposition of TiN by plasma activated EB-PVD: Activation by thermal electron emission from molten niobium
Authors
Keywords
Electron beam evaporation, Plasma activation, Thermal electron emission, Refractory, Niobium
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 276, Issue -, Pages 645-648
Publisher
Elsevier BV
Online
2015-06-07
DOI
10.1016/j.surfcoat.2015.05.047

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