Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

Published 2015 View Full Article

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Title
Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition
Authors
Keywords
HIPIMS, HPPMS, TiSiN, Magnetron sputtering, Ionized PVD
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 280, Issue -, Pages 174-184
Publisher
Elsevier BV
Online
2015-09-05
DOI
10.1016/j.surfcoat.2015.09.001

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