In-plane thermal conductivity of sub-20 nm thick suspended mono-crystalline Si layers
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Title
In-plane thermal conductivity of sub-20 nm thick suspended mono-crystalline Si layers
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 25, Issue 18, Pages 185402
Publisher
IOP Publishing
Online
2014-04-16
DOI
10.1088/0957-4484/25/18/185402
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