In situcontrol of oxygen vacancies in TiO2by atomic layer deposition for resistive switching devices

Title
In situcontrol of oxygen vacancies in TiO2by atomic layer deposition for resistive switching devices
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 29, Pages 295202
Publisher
IOP Publishing
Online
2013-06-26
DOI
10.1088/0957-4484/24/29/295202

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