Anisotropic remastering for reducing feature sizes on UV nanoimprint lithography replica molds

Published 2012 View Full Article

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Title
Anisotropic remastering for reducing feature sizes on UV nanoimprint lithography replica molds
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 16, Pages 165302
Publisher
IOP Publishing
Online
2012-04-02
DOI
10.1088/0957-4484/23/16/165302

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