Anisotropic remastering for reducing feature sizes on UV nanoimprint lithography replica molds

标题
Anisotropic remastering for reducing feature sizes on UV nanoimprint lithography replica molds
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 23, Issue 16, Pages 165302
出版商
IOP Publishing
发表日期
2012-04-02
DOI
10.1088/0957-4484/23/16/165302

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