Large-scale ordered silicon microtube arrays fabricated by Poisson spot lithography

Published 2011 View Full Article

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Title
Large-scale ordered silicon microtube arrays fabricated by Poisson spot lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 39, Pages 395301
Publisher
IOP Publishing
Online
2011-09-03
DOI
10.1088/0957-4484/22/39/395301

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