Large-scale ordered silicon microtube arrays fabricated by Poisson spot lithography

出版年份 2011 全文链接

标题

Large-scale ordered silicon microtube arrays fabricated by Poisson spot lithography

作者

关键词

-

出版物

NANOTECHNOLOGY

Volume 22, Issue 39, Pages 395301

出版商

IOP Publishing

发表日期

2011-09-03

DOI

10.1088/0957-4484/22/39/395301

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