Patterning of various silicon structures via polymer lithography and catalytic chemical etching

标题
Patterning of various silicon structures via polymer lithography and catalytic chemical etching
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 22, Issue 27, Pages 275305
出版商
IOP Publishing
发表日期
2011-05-21
DOI
10.1088/0957-4484/22/27/275305

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started