Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement

Published 2008 View Full Article

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Title
Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 39, Pages 395302
Publisher
IOP Publishing
Online
2008-08-09
DOI
10.1088/0957-4484/19/39/395302

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