Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement

标题
Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 19, Issue 39, Pages 395302
出版商
IOP Publishing
发表日期
2008-08-09
DOI
10.1088/0957-4484/19/39/395302

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