Tuning the surface morphology in self-organized ion beam nanopatterning of Si(001) via metal incorporation: from holes to dots

标题
Tuning the surface morphology in self-organized ion beam nanopatterning of Si(001) via metal incorporation: from holes to dots
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 19, Issue 35, Pages 355306
出版商
IOP Publishing
发表日期
2008-07-18
DOI
10.1088/0957-4484/19/35/355306

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