Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection

标题
Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 19, Issue 23, Pages 235304
出版商
IOP Publishing
发表日期
2008-05-07
DOI
10.1088/0957-4484/19/23/235304

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