On-Chip Inductors with Self-Rolled-Up SiNx Nanomembrane Tubes: A Novel Design Platform for Extreme Miniaturization

Published 2012 View Full Article

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Title
On-Chip Inductors with Self-Rolled-Up SiNx Nanomembrane Tubes: A Novel Design Platform for Extreme Miniaturization
Authors
Keywords
-
Journal
NANO LETTERS
Volume 12, Issue 12, Pages 6283-6288
Publisher
American Chemical Society (ACS)
Online
2012-11-22
DOI
10.1021/nl303395d

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