On-Chip Inductors with Self-Rolled-Up SiNx Nanomembrane Tubes: A Novel Design Platform for Extreme Miniaturization

标题
On-Chip Inductors with Self-Rolled-Up SiNx Nanomembrane Tubes: A Novel Design Platform for Extreme Miniaturization
作者
关键词
-
出版物
NANO LETTERS
Volume 12, Issue 12, Pages 6283-6288
出版商
American Chemical Society (ACS)
发表日期
2012-11-22
DOI
10.1021/nl303395d

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