Correction
Engineering, Electrical & Electronic
Alexander Dabsch, Christoph Rosenberg, Patrick Klug, Majesa Trimmel, Franz Keplinger
Summary: This research introduces an MEMS Sensor for measuring displacement in at least two directions. The device is a resonant, Lorentz force driven, and cross-shaped sensing structure. It measures the change in resonance frequency caused by the deformation of the sensor frame. The study aims to implement the sensor in a two-dimensional micro manipulation system and uses a micro system analyzer to detect resonance frequencies of different vibration modes.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2022)
Article
Chemistry, Multidisciplinary
Junqiang Wang, Zehua Zhu, Yue Qi, Mengwei Li
Summary: A novel crossbeam structure with a graphene varistor protected by Si3N4 is proposed for N/MEMS mechanical sensors, which exhibits excellent mechanoelectrical coupling performance and high sensitivity.
Article
Automation & Control Systems
Huan Liu, Mario Selvaggio, Pasquale Ferrentino, Rocco Moccia, Salvatore Pirozzi, Umberto Bracale, Fanny Ficuciello
Summary: The article introduces the design, development, and preliminary evaluation of the MUSHA Hand II, a multifunctional hand with force sensors for robot-assisted laparoscopic surgery. The hand features three underactuated fingers with force sensors, allowing for different modes of operation and enhancing adaptivity and compliance. The hand has been demonstrated to effectively enhance the functionality of a robotic surgical system and overcome the limits on force sensing in laparoscopic surgery.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2021)
Article
Engineering, Mechanical
P. C. Zuo, H. Yu, J. L. Liu, Z. J. Wen
Summary: The study conducted tension and shear experiments on the particle raft using a self-assembled loading device, observing crack initiation and propagation. Experimental results were compared with PFC3D simulations, showing excellent agreement and indicating that the particle raft has mechanical properties between solid and liquid. These findings offer inspiration for engineering new devices and materials at the microscale.
ACTA MECHANICA SINICA
(2021)
Article
Engineering, Electrical & Electronic
Olivia Leslie, David Cordova Bulens, Pablo Martinez Ulloa, Stephen J. Redmond
Summary: This article proposes an optical-based tactile sensor design concept, which can infer force and displacement from deformations of a silicone pillar. The sensor offers a simple, low-cost fabrication method and a small-scale form factor. It is capable of measuring 3-D displacement, 3-D force, and vibration, with good sensitivity in a wide frequency range.
IEEE SENSORS JOURNAL
(2023)
Article
Chemistry, Analytical
Laura De Arco, Maria Jose Pontes, Marcelo E. V. Segatto, Maxwell E. Monteiro, Carlos A. Cifuentes, Camilo A. R. Diaz
Summary: This paper presents the development of an intelligent soft-sensor system that adds haptic perception to the underactuated hand prosthesis PrHand. Two sensors based on optical fiber were constructed: one for finger joint angles and the other for fingertips' contact force. The sensors showed polynomial response with R-2 values higher than 92% for angle measurements and higher than 94% for tactile force measurements. The system successfully monitored the prosthesis activity and classified eight grip types with high accuracy using machine learning algorithms.
Article
Engineering, Manufacturing
Jungsub Kim, Seungjoo Lee, Heebum Chun, ChaBum Lee
Summary: The study introduces a new type of dimensional sensor, CES, that can be used for spindle dynamic characterization and in-situ monitoring, unaffected by target surface curvature and lateral motion of the spindle.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Engineering, Electrical & Electronic
Yuwei Liu, Daoye Zheng, Qiuxiao Feng, Yu-Sheng Lin
Summary: This article presents a design of an electrothermally controllable terahertz metamaterial composed of split-ring resonators on a silicon substrate. By applying a direct current bias voltage, the surrounding refraction index changes, resulting in resonant frequency shift. The proposed design achieves a tunable triple-resonance in transverse electric mode, with tuning ranges of 24 GHz, 40 GHz, and 32 GHz, respectively. The maximum sensitivity is 42 GHz/volt and the maximum Q-factor is 24.5. This research provides potential applications of the electrothermally controllable terahertz metamaterial in polarization-dependent filters and sensors.
SENSORS AND ACTUATORS A-PHYSICAL
(2022)
Article
Engineering, Electrical & Electronic
Wei-Cheng Lai, Meng-Lin Hsieh, Weileun Fang
Summary: This study presents the design and implementation of a MEMS capacitive tactile force sensor with PDMS filler, which can modulate the sensitivity and sensing range by varying input voltages. Different input voltages can be applied to each sensor to fabricate tactile sensors of different sensitivities and ranges on the same chip.
IEEE SENSORS JOURNAL
(2021)
Article
Chemistry, Analytical
Larisa Dunai, Martin Novak, Carmen Garcia Espert
Summary: This paper outlines the development of a prosthetic hand based on human hand anatomy, featuring the use of 3D printing for hand phalanges and innovative prosthetic hand joins. The use of driven wire tendons, force sensitive resistors, and Electromyogram sensors contributes to increased movement freedom and hand action control for the prosthetic hand.
Article
Polymer Science
Masahiko Mitsuzuka, Jun Takarada, Ikuo Kawahara, Ryota Morimoto, Zhongkui Wang, Sadao Kawamura, Yoshiro Tajitsu
Summary: A tactile sensor for robot hands has been developed, which can measure normal and tangential forces using photoelasticity. The sensor utilizes light scattering phenomenon to detect forces.
Correction
Automation & Control Systems
Yunjoo Kim, Jung Kim
Summary: In human-robot collaboration, physical hand-over-hand communication of the human operator's intention is crucial. This study proposes an external force estimation method that uses tactile sensors to measure both grasping and external forces acting on a robot hand. The magnitude and contact angle of the external force are computed to determine the user's intention.
INTERNATIONAL JOURNAL OF CONTROL AUTOMATION AND SYSTEMS
(2022)
Article
Computer Science, Artificial Intelligence
Chao Zeng, Shuang Li, Zhaopeng Chen, Chenguang Yang, Fuchun Sun, Jianwei Zhang
Summary: In this work, a human-in-the-loop learning-control approach is proposed for acquiring compliant grasping and manipulation skills of a multifinger robot hand. The approach uses a markerless vision-based teleoperation system for task demonstration and trains a neural network model to map the pose of the human hand to the joint angles of the robot hand in real-time. An adaptive force control strategy is designed to predict the desired force control commands based on the pose difference between the robot hand and the human hand. The approach has been verified in both simulation and real-world scenarios, showing more reliable performances than the current widely used position control mode for compliant grasping and manipulation behaviors.
IEEE TRANSACTIONS ON NEURAL NETWORKS AND LEARNING SYSTEMS
(2023)
Article
Engineering, Electrical & Electronic
Zhongxin Tang, Shuxin Wang, Chaoyang Shi
Summary: This paper presents a novel Fiber Bragg Grating (FBG) based hybrid force and displacement sensor with high sensitivity and linearity. The sensor utilizes a carefully designed spring structure and optical fiber layout to achieve excellent performance through optimized design.
IEEE SENSORS JOURNAL
(2021)
Article
Optics
Jinjin Liang, Xin Li, Jinjian Li, Jingfu Ye, Yi Liu, Ming Chen, Zhenrong Zhang, Shiliang Qu
Summary: This paper proposes and experimentally demonstrates a high-temperature-sensitive and spectrum-contrast-enhanced Fabry Perot interferometer (FPI). The sensor consists of a hollow cylindrical waveguide filled with polydimethylsiloxane (PDMS) and a semi-elliptic PDMS end face. The results show that the proposed sensor exhibits excellent structural stability, high spectral contrast, and high temperature sensitivity. It has great potential in biomedicine, industrial manufacturing, agricultural production, and other applications.
Article
Chemistry, Physical
Takashi Matsumae, Mu Fengwen, Shoya Fukumoto, Masanori Hayase, Yuichi Kurashima, Eiji Higurashi, Hideki Takagi, Tadatomo Suga
Summary: Research investigated the direct bonding of GaN and Si substrates at 125 degrees C under atmospheric conditions using various Plasma activation bonding (PAB) methods. The substrates activated by sequential oxygen and nitrogen plasma formed a strong bond, causing fracture within the GaN bulk during strength measurement. An amorphous layer of GaOx and SiOx was confirmed at the bonding interface. This plasma-assisted low-temperature direct bonding may offer insights for advanced electronic devices utilizing the GaN-Si heterostructure.
JOURNAL OF ALLOYS AND COMPOUNDS
(2021)
Article
Engineering, Electrical & Electronic
Yuichi Kurashima, Takashi Matsumae, Eiji Higurashi, Sinya Yanagimachi, Takaaki Kusui, Mitsuhiro Watanabe, Hideki Takagi
Summary: The study demonstrates that thin Au/Ti films are suitable as both bonding layers and gettering materials for MEMS packaging. When annealed under specific conditions, they can effectively reduce voids during bonding and maintain the strength of the bonding interface.
MICROELECTRONIC ENGINEERING
(2021)
Article
Nanoscience & Nanotechnology
Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Hitoshi Umezawa, Eiji Higurashi
Summary: Direct bonding of diamond (100) substrate and silicon wafer was achieved at 250 degrees C under atmospheric conditions, preserving the crystallinity and achieving successful bonding. By applying pressure and appropriate treatment steps, complete bonding was achieved, despite the presence of some contaminated areas.
SCRIPTA MATERIALIA
(2021)
Article
Physics, Applied
Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Hitoshi Umezawa, Eiji Higurashi
Summary: This study successfully bonded SiC and Ga2O3 substrates under atmospheric conditions using an amorphous layer, reducing the thickness of the intermediate layer at the interface. The direct bonding via dehydration reaction contributes to future heterogeneous devices based on dissimilar substrates.
JOURNAL OF APPLIED PHYSICS
(2021)
Article
Physics, Applied
Shingo Kariya, Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Masanori Hayase, Eiji Higurashi
Summary: An Au/Ta/Ti metal multilayer was developed to improve the high vacuum packaging process for microdevice fabrication. The study showed that the coated wafer could form direct bonding and absorb residual gas, and investigated the effect of Ta layer thickness on Ti atom diffusion.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2022)
Article
Physics, Applied
Shoya Fukumoto, Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Masanori Hayase, Eiji Higurashi
Summary: Direct bonding of GaN and Si substrates was achieved by wet treatments, with an amorphous intermediate layer of 1.7 nm thickness. This technique provides a new method for future heterogeneous integration.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2022)
Article
Nanoscience & Nanotechnology
Shingo Kariya, Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Masanori Hayase, Eiji Higurashi
Summary: In this study, a metal multilayer that can provide hermetic sealing and absorb residual gases after degassing the assemblies was developed, simplifying the vacuum packaging processes in the electronics industry.
MICROSYSTEMS & NANOENGINEERING
(2022)
Article
Nanoscience & Nanotechnology
Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Yusuke Shirayanagi, Shuichi Hiza, Kunihiko Nishimura, Eiji Higurashi
Summary: A new method was developed to bond GaN and diamond substrates using an atomically thin bonding layer at room temperature, which effectively prevents physical damage to diamond crystals caused by sputtering, potentially facilitating high-power and high-frequency operation of GaN devices.
SCRIPTA MATERIALIA
(2022)
Article
Chemistry, Analytical
Takashi Matsumae, Shingo Kariya, Yuichi Kurashima, Le Hac Huong Thu, Eiji Higurashi, Masanori Hayase, Hideki Takagi
Summary: This study demonstrates a vacuum packaging method using a getter layer for room-temperature bonding. Two fabrication techniques are utilized to obtain smooth getter layers, simplifying the packaging process.
Article
Chemistry, Analytical
Lan Zhang, Jian Lu, Hideki Takagi, Sohei Matsumoto, Eiji Higurashi
Summary: A compact MEMS Pirani vacuum sensor was designed and successfully fabricated, showing high responsivity in low-pressure domains. The sensor has potential applications in various fields for vacuum monitoring.
Article
Physics, Applied
Kai Takeuchi, Junsha Wang, Beomjoon Kim, Tadatomo Suga, Eiji Higurashi
Summary: The surface activated bonding (SAB) technique allows room temperature bonding of metals by forming metal bonds between clean and reactive surfaces. However, re-adsorption on the activated surface decreases the bonding quality, limiting its applicability for electronics packaging. This study proposes and demonstrates the prolongation of surface activation effect for room temperature bonding of Au using a self-assembled monolayer (SAM) protection. The surface analysis shows that the clean and activated Au surface is protected from re-adsorption by SAM, allowing for time-independent bonding of Au at room temperature.
APPLIED PHYSICS LETTERS
(2023)
Article
Engineering, Electrical & Electronic
Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto
Summary: This study introduces a new pixel-parallel three-layer stacked complementary metal-oxide-semiconductor image sensor. With the use of hybrid bonding and silicon-on-insulator (SOI) wafers, the sensor achieves multilayer stacking and pixel-parallel signal processing. The three-layered pixel features a photodiode, pulse generation circuit, and counters, serving as analog-to-digital converters (ADCs) and reducing its size compared to conventional sensors. The developed technology demonstrates high-performance characteristics and the potential for various applications, such as high-quality video cameras, recognition, automotive systems, robots, and Internet-of-Things devices.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2023)
Proceedings Paper
Engineering, Electrical & Electronic
Shoya Fukumoto, Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Hitoshi Umezawa, Masanori Hayase, Eiji Higurashi
Summary: Diamond substrates were directly bonded to Si substrates using an NH3/H2O2 mixture cleaning followed by annealing at 250 degrees C in atmospheric condition. The thickness of the intermediate layer was 2.5 nm, and the shear strength reached 6.3 MPa. This bonding procedure, which does not require any vacuum equipment, is achievable by simple cleaning and annealing machines, making it suitable for industrial manufacturing processes.
2021 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP 2021)
(2021)
Proceedings Paper
Engineering, Electrical & Electronic
S. Kariya, T. Matsumae, Y. Kurashima, H. Takagi, M. Hayase, E. Higurashi
Summary: The Au/Pt/Ti metal multilayers enable wafer-level packaging and gas gettering, potentially simplifying the vacuum sealing process.
2021 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP 2021)
(2021)
Proceedings Paper
Engineering, Electrical & Electronic
Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Kazunori Nishizono, Tsutomu Amano, Eiji Higurashi
Summary: The study showed that adding a Si adhesion layer can enhance the bonding strength between the AlN ceramic substrate and the Si substrate, providing an efficient cooling system for future high power electronic devices.
2021 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP 2021)
(2021)
Article
Engineering, Electrical & Electronic
Kehao Feng, Zhenghua Zhang, Guohua Bai, Xiuyuan Fan, Rongzhi Zhao, Xuefeng Zhang
Summary: This paper proposes a new method to accurately evaluate the high-frequency power loss of soft magnetic materials. Through a two-step calibration, the system is able to compensate for the phase angle discrepancy between the exciting current and induced voltage, enabling a higher power loss measurement frequency.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Mingfang Kang, Tong Liu, Hongmei Sun, Lin Li, Keliang Wang
Summary: In this study, the absorption performance of ambient nitrogenous toxic gases on a monolayer of blue phosphorus phase germanium selenide (GeSe) was investigated using density-functional theory calculations. The results showed that GeSe monolayer exhibits higher sensitivity and selectivity for the hazardous gas NO.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Yaqiong Niu, Zhicheng Zou, Longsheng Cheng, Chaofeng Ye
Summary: This paper proposes a novel method to stabilize the laser diode output using a close-loop control with two feedbacks. The proposed method performs better for long-time operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jiajie Li, Ying Liu, Zhen Chai, Qian Cao, Renjie Li, Yueyang Zhai
Summary: This study proposed an efficient and high-quality beam-splitting method based on a diffractive optical element, enabling multichannel SERF atomic magnetometers to achieve ultra-high consistency and sensitivity. It has significant applications in array biomagnetic measurement systems.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
E. Oliveira, C. Doering, H. Fouckhardt
Summary: With the development of Lab on a chip technology, fluid management using dispersed droplets has become an important approach. Electrowetting on dielectric (EWOD) is one method for droplet actuation, but it requires prior definition of droplet positions. Optoelectrowetting (OEW) goes further by allowing changes in electrical parameters through impinging light spots, without the need for predefined droplet positions. This study re-evaluates the key parameters of OEW and explores their effects on droplet actuation using numerical optimization methods.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Haipeng Wang, Zhiguo Wang, Gancheng Zhu, Shuai Zhang
Summary: A novel capacitive proximity skin was developed to improve the performance of robotics in handling liquid-filled containers. This skin features a flexible structure that can adapt to different grippers and seamlessly integrate with Robot Operating System. Experimental results demonstrated that this proximity skin achieved data-lossless detection and contactless measurement of liquid level, making it suitable for grasping operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Tsenguun Byambadorj, Xiangyu Zhao, Yutao Qin, Yogesh B. Gianchandani
Summary: In this research, a monolithically microfabricated Knudsen pump (KP) without suspended membranes was presented. These pumps offer improved mechanical robustness, wider process window, and simplified microfabrication process compared to previous designs. The experimental results matched the modeling results well, indicating the potential for monolithic integration onto complex lab-on-a-chip systems.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Hamed Karami, Saeed Karami Chemeh, Vahid Azizi, Hooman Sharifnasab, Jose Ramos, Mohammed Kamruzzaman
Summary: Aroma is a significant quality trait for pharmaceutical plants and their products, indicating the quality of the raw material. An electronic nose is an efficient approach for identifying and evaluating the aroma of essential oils. In this study, tarragon was dried at different temperatures and air velocities, and the purity of tarragon essential oil was evaluated using an electronic nose. Multivariate data analysis and artificial neural networks modeling were employed to quantify and classify the obtained essential oils.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Xiaoyang Duan, Dan Xu, Wenjun Jia, Ran Li, Bohao Sun, Ruitian Yan, Wenjie Zhao
Summary: Flower-like WO3/WS2 heterojunction materials constructed via a low-temperature in-situ oxidation method exhibit significant improvements in the detection of NO2 gas in gas sensors, along with good selectivity and reproducibility.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Peng Yu, Mengyang Zhang, Manqi You, Yuxi Gao, Landong Xiao, Yan Peng, Jingxia Lai, Zhouzhao Shi, Siwei Luo, Gencai Guo, Gang Guo
Summary: Recent studies have shown that two-dimensional Janus transition metal dichalcogenides (TMDs) have great potential for applications in gas sensors. By conducting first principles calculations, this study explores the potential application of Pd-doped monolayer HfSeS as gas sensor materials for detecting CO, CO2, NH3, and NO. The results demonstrate the good thermodynamical stability and reversible adsorption of these molecules on both pristine and Pd-doped HfSeS, with Pd-doped HfSeS showing higher sensitivity towards NO due to its metallic behavior upon NO adsorption.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jinlan Yang, Linjiao Li, Jun Huang, Quan Zhang, Hiba Affane
Summary: This study proposes a method for large-scale aggregation of micro-particles by creating a vortex region using low-frequency oscillation. Experimental results show that this method can achieve a large aggregation area and has the advantages of low cost and low power consumption.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jitendra Singh, Saurabh Kumar Gupta, Vinita
Summary: In this investigation, a Surface Acoustic Wave (SAW) formalin gas sensor was explored for low-level formalin gas sensing applications. The sensor showed stable response and high sensitivity to formalin gas concentration, making it a reliable and useful sensor for room temperature operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Junyao Wang, Yahao Liu, Huan Liu, Qi Hou, Jianxin Xu, Hongxu Pan, Jingran Quan, Yansong Chen, Hanbo Yang, Lixiang Li
Summary: A flexible electrode with a serpentine-shaped tetra-chiral structure was designed to improve the mechanical properties and prevent mechanical fracture of flexible electrodes. The research demonstrated that this structure reduced the maximum tensile stress by 87.19% compared to the existing tetra-chiral structure. The flexible electrode remained conductive even at a strain of 70% and showed resistance values of 5 ohm and 4.4 ohm at a bending angle of 180 degrees and after 1000 fold cycles. Furthermore, the flexible electrodes showed great potential in biological signal monitoring, particularly in collecting ECG and pulse signals.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Taihao Chen, Yong Fang, Mengru Zhu, Zhiwei Zhao, Wei Lei, Zhuoya Zhu, Helong Jiang
Summary: Flexible dual-spectral carbon nanodots/flexible n-silicon heterojunction photodetectors with high responsivity and detectivity are reported. These detectors show photo response in UV illumination and only in forward bias under visible illumination. The photocurrent of the device remains high even under bending strain.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
M. S. Sikandar Bathusha, Israr Ud Din, Rehan Umer, Kamran A. Khan
Summary: Graphene-based nanomaterials are used as embedded sensors to monitor fracture behavior in composite structures. This study investigates the in-situ crack propagation and fracture behavior in a glass fiber reinforced polymer composite using embedded reduced graphene oxide coated fabrics and highly conductive graphene nanoplatelet paper.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
