A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications

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Title
A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications
Authors
Keywords
Air-coupled, Microelectromechanical systems, Multiple moving membrane capacitive micromachined ultrasonic transducer, Quasi-static displacement, Resonant frequency
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 222, Issue -, Pages 309-313
Publisher
Elsevier BV
Online
2014-12-05
DOI
10.1016/j.sna.2014.11.018

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