A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications

出版年份 2015 全文链接

标题

作者

关键词

Air-coupled, Microelectromechanical systems, Multiple moving membrane capacitive micromachined ultrasonic transducer, Quasi-static displacement, Resonant frequency

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume 222, Issue -, Pages 309-313

出版商

Elsevier BV

发表日期

2014-12-05

DOI

10.1016/j.sna.2014.11.018

向作者/读者发起求助以获取更多资源

Protocol

在线求助

Reagent

在线求助

Reprint

联系作者

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now