Effect of indium as a surfactant in (Ga1−xInx)2O3epitaxial growth onβ-Ga2O3by metal organic vapour phase epitaxy

Published 2015 View Full Article

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Title
Effect of indium as a surfactant in (Ga1−xInx)2O3epitaxial growth onβ-Ga2O3by metal organic vapour phase epitaxy
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 30, Issue 2, Pages 024013
Publisher
IOP Publishing
Online
2015-01-20
DOI
10.1088/0268-1242/30/2/024013

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