Fabrication and characterization of highly sensitive ZnO/Si SAW device with Pd selective layer for F2 gas sensing

Title
Fabrication and characterization of highly sensitive ZnO/Si SAW device with Pd selective layer for F2 gas sensing
Authors
Keywords
Frequency Shift, Surface Acoustic Wave, Lithium Niobate, Lithium Tantalate, Piezoelectric Substrate
Publisher
Springer Nature
Online
2014-08-06
DOI
10.1007/s00542-014-2277-6

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