Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes

Electret charging method based on soft X-ray photoionization for MEMS transducers

(2014) Kei Hagiwara et al.   IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION

Fundamental issues in nonlinear wideband-vibration energy harvesting

(2013) Einar Halvorsen   PHYSICAL REVIEW E

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

(2013) A.T. Tran et al.   SENSORS AND ACTUATORS A-PHYSICAL

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

(2012) Agne Zukauskaite et al.   JOURNAL OF APPLIED PHYSICS

A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations

(2012) T. Galchev et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

An active heat-based restoring mechanism for improving the reliability of RF-MEMS switches

(2011) J. Iannacci et al.   MICROELECTRONICS RELIABILITY

A Vibration-Based Electromagnetic Energy Harvester Using Mechanical Frequency Up-Conversion Method

(2010) Özge Zorlu et al.   IEEE SENSORS JOURNAL

Experimental Validation of Mixed Electromechanical and Electromagnetic Modeling of RF-MEMS Devices Within a Standard IC Simulation Environment

(2010) Jacopo Iannacci et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism

(2010) J. Iannacci et al.   MICROELECTRONICS RELIABILITY

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

(2009) Morito Akiyama et al.   APPLIED PHYSICS LETTERS