Electron Beam Effects on Silicon Oxide Films – Structure and Electrical Properties

Published 2018 View Full Article

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Title
Electron Beam Effects on Silicon Oxide Films – Structure and Electrical Properties
Authors
Keywords
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Journal
MICROSCOPY AND MICROANALYSIS
Volume 24, Issue S1, Pages 1810-1811
Publisher
Cambridge University Press (CUP)
Online
2018-08-07
DOI
10.1017/s1431927618009534
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