In-Situ Quantification of TEM Lamella Thickness and Ga Implantation in the FIB

Published 2014 View Full Article

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Title
In-Situ Quantification of TEM Lamella Thickness and Ga Implantation in the FIB
Authors
Keywords
-
Journal
MICROSCOPY AND MICROANALYSIS
Volume 20, Issue S3, Pages 342-343
Publisher
Cambridge University Press (CUP)
Online
2014-08-27
DOI
10.1017/s1431927614003432

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