Detection of Single Atoms and Buried Defects in Three Dimensions by Aberration-Corrected Electron Microscope with 0.5-Å Information Limit

Published 2008 View Full Article

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Title
Detection of Single Atoms and Buried Defects in Three Dimensions by Aberration-Corrected Electron Microscope with 0.5-Å Information Limit
Authors
Keywords
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Journal
MICROSCOPY AND MICROANALYSIS
Volume 14, Issue 05, Pages 469-477
Publisher
Cambridge University Press (CUP)
Online
2008-09-16
DOI
10.1017/s1431927608080902
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