Determination of complex dielectric functions at HfO2/Si interface by using STEM-VEELS

Published 2008 View Full Article

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Title
Determination of complex dielectric functions at HfO2/Si interface by using STEM-VEELS
Authors
Keywords
-
Journal
MICRON
Volume 40, Issue 3, Pages 365-369
Publisher
Elsevier BV
Online
2008-10-22
DOI
10.1016/j.micron.2008.10.006

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