Determination of complex dielectric functions at HfO2/Si interface by using STEM-VEELS

标题
Determination of complex dielectric functions at HfO2/Si interface by using STEM-VEELS
作者
关键词
-
出版物
MICRON
Volume 40, Issue 3, Pages 365-369
出版商
Elsevier BV
发表日期
2008-10-22
DOI
10.1016/j.micron.2008.10.006

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