Metal-layer capacitors in the 65nm CMOS process and the application for low-leakage power-rail ESD clamp circuit

Title
Metal-layer capacitors in the 65nm CMOS process and the application for low-leakage power-rail ESD clamp circuit
Authors
Keywords
-
Journal
MICROELECTRONICS RELIABILITY
Volume 54, Issue 1, Pages 64-70
Publisher
Elsevier BV
Online
2013-09-22
DOI
10.1016/j.microrel.2013.08.011

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