Measurement and analysis of substrate leakage current of RF mems capacitive switches

Published 2013 View Full Article

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Title
Measurement and analysis of substrate leakage current of RF mems capacitive switches
Authors
Keywords
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Journal
MICROELECTRONICS RELIABILITY
Volume 54, Issue 1, Pages 152-159
Publisher
Elsevier BV
Online
2013-07-23
DOI
10.1016/j.microrel.2013.07.011

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