UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements

Published 2010 View Full Article

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Title
UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements
Authors
Keywords
-
Journal
MICROELECTRONICS RELIABILITY
Volume 50, Issue 9-11, Pages 1312-1315
Publisher
Elsevier BV
Online
2010-08-05
DOI
10.1016/j.microrel.2010.07.049

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