Experimental and simulation studies of resistivity in nanoscale copper films

Published 2008 View Full Article

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Title
Experimental and simulation studies of resistivity in nanoscale copper films
Authors
Keywords
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Journal
MICROELECTRONICS RELIABILITY
Volume 49, Issue 2, Pages 127-134
Publisher
Elsevier BV
Online
2008-12-25
DOI
10.1016/j.microrel.2008.11.003

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